FACILITIES -- Photolithography, Room 0205C

Cleanroom

cleanroom

 

Class 100 cleanroom with facilities for spinning, exposing and developing positive photoresist and wirebonding samples

Super-user: Brian Straughn, straughn@umd.edu, x56131
 
Supervisors: Prof Michael Fuhrer, mfuhrer@physics.umd.edu,  x56143 and Prof Chris Lobb, lobb@squid.umd.edu, x56130

Masker Aligner

mask aligner  

Super-user: Brian Straughn, straughn@umd.edu, x56131

Supervisor: Prof. Chris Lobb, lobb@squid.umd.edu, x56130

Wirebonder

wire bonder  

Super-user: Hanhee Paik
  
Supervisor: Prof. Chris Lobb, lobb@squid.umd.edu, x56130

 

 

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